Apollo 300
| Summary |
|
Accelerating voltage
|
30kV
|
|
In-chamber image detection
|
Everhart-Thorney SEI
Scintillator or solid state BEI
|
|
Through-lens detectors
|
SE and BE standard
|
|
In-column Faraday Cage
|
Not available
|
|
Variable chamber vacuum
|
1-150Pa
|
|
Magnification range
|
10x to 2,500,000x
|
|
Fully Eucentric 6-axis stage
|
X=100mm, Y=100mm, Z=50mm, Z'=10mm, Rotate=360º,
Tilt=-10º to +90º
|
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Stage motorisation
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X, Y and Z - standard rotate and tilt - optional
|
|
Alternative 6-axis stage
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X=100mm, Y=150mm
|
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Chamber size
|
315mm high x 415mm x 315mm
|
|
 Comprehensive range of options available |
Apollo 300
Thermal Field Emission Scanning Electron Microscope designed to cover a wide range of applications that require ultra high-resolution performance. The Apollo 300 Operates up to 30kV and incorporates through-lens detection for enhancing low kV operation.
Its in lens SE and BSE detection allow for efficient Low kV operation.
