CamScan Superior Electron Optics by Design
CS3200
X & Y Movement
100mm x 100mm
Cathode Options
Tungsten (Standard)LaB6 (Option)
SEI Resolution
<3.0nm @ 30kV (W)<2.5nm @ 30kV (LaB6)
Accelerating Voltage
40kV (Standard)50kV (Option)
Low Vacuum Model: CS3200LV
Chamber Vacuum
CS3400
100mm x 150mm
Low Vacuum Model: CS3400LV
1-300Pa (Standard)
CS3500FE
100mm x 150mm (Standard)100mm x 100mm (Option)
1.5nm @ 30kV
50kV (Standard)30kV (Option)
Low Vacuum Model: CS3500FE/LV
1-150Pa